From narii at snf.stanford.edu Sat Jun 4 17:49:26 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 4 Jun 2011 17:49:26 -0700 Subject: Problem teos2 SNF 2011-06-04 17:49:25: Leak check failed Message-ID: Twice out of 3 times, leak check failed, around at the very end of leak check step. From grahamab at snf.stanford.edu Sun Jun 5 19:59:52 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sun, 5 Jun 2011 19:59:52 -0700 Subject: Shutdown teos2 SNF 2011-06-05 19:59:51: won't maintain process pressure Message-ID: ran this morning without any issue. this afternoon I tried to run it three different times. attempt #1: passed leak check, but within minutes of starting the deposition the process pressure had risen to 1300 (at which point I aborted it) attempt #2: retried without boating out and did not pass leak check attempt #3: boated out, retried with same result as attempt #1. passed leak check, but then immediately the pressure started rising. I would very much like to try again in the morning if someone can take a look at it and find a solution. From tberg at snf.stanford.edu Mon Jun 6 09:27:32 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Jun 2011 09:27:32 -0700 Subject: Problem teos2 SNF 2011-06-04 17:49:25: Leak check failed Message-ID: Cleaned rear of tube and trap. Base is good, leak rate good and dep pressure is good From tberg at snf.stanford.edu Mon Jun 6 09:27:40 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Jun 2011 09:27:40 -0700 Subject: Shutdown teos2 SNF 2011-06-05 19:59:51: won't maintain process pressure Message-ID: Cleaned rear of tube and trap. Base is good, leak rate good and dep pressure is good From grahamab at snf.stanford.edu Mon Jun 6 14:48:07 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Mon, 6 Jun 2011 14:48:07 -0700 Subject: Problem teos2 SNF 2011-06-06 14:48:06: tube full of particles Message-ID: can visibly see particles and debris in the bottom of the tube. wafers near the front of the boat had particles all over them. particles were concentrated near the part of the wafer nearest to the bottom of the tube. From seymour at snf.stanford.edu Tue Jun 7 08:46:24 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 7 Jun 2011 08:46:24 -0700 Subject: Problem teos2 SNF 2011-06-06 14:48:06: tube full of particles Message-ID: cooled down tube, removed loader and vacuumed out tube and loader. Installed loader, turned on breaker and started pump7. From tberg at snf.stanford.edu Tue Jun 21 13:30:08 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 21 Jun 2011 13:30:08 -0700 Subject: Shutdown teos2 SNF 2011-06-21 13:30:07: TEOS Empty Message-ID: From seymour at snf.stanford.edu Tue Jun 21 15:16:39 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Jun 2011 15:16:39 -0700 Subject: Shutdown teos2 SNF 2011-06-21 13:30:07: TEOS Empty Message-ID: replaced teos canister From seymour at snf.stanford.edu Tue Jun 21 15:18:15 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Jun 2011 15:18:15 -0700 Subject: Problem teos2 SNF 2011-06-21 15:18:15: teos replaced Message-ID: It is up to temp. The leak check was good. I flowed 300 sccm O2 and 60 sccm teos. Looks good but may want to test it. From tberg at snf.stanford.edu Mon Jun 27 06:06:47 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 27 Jun 2011 06:06:47 -0700 Subject: Problem teos2 SNF 2011-06-21 15:18:15: teos replaced Message-ID: has been run several times by users-no problem reported From grahamab at snf.stanford.edu Mon Jun 27 15:19:55 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Mon, 27 Jun 2011 15:19:55 -0700 Subject: Problem teos2 SNF 2011-06-27 15:19:55: process pressure problems Message-ID: pressure steadily increased from 1200 to 1900 during teos2std recipe. noticed pressure increase ~1.5 hours into deposition and it steadily increased until it was about 1900 at 2.5hrs (end of deposition). From seymour at snf.stanford.edu Tue Jun 28 07:55:49 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 28 Jun 2011 07:55:49 -0700 Subject: Shutdown teos2 SNF 2011-06-28 07:55:48: pulling tube Message-ID: From seymour at snf.stanford.edu Wed Jun 29 09:41:14 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 29 Jun 2011 09:41:14 -0700 Subject: Comment teos2 SNF 2011-06-29 09:41:13: replaced tube Message-ID: passed leak checks. cleaning exhaust trap. From seymour at snf.stanford.edu Wed Jun 29 12:09:05 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 29 Jun 2011 12:09:05 -0700 Subject: Shutdown teos2 SNF 2011-06-28 07:55:48: pulling tube Message-ID: tube changed, exhaust line trap cleaned. good base and leak check. with 500 sccm N2 pressure was 335 mT. needs test after repair From seymour at snf.stanford.edu Wed Jun 29 12:09:42 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 29 Jun 2011 12:09:42 -0700 Subject: Comment teos2 SNF 2011-06-29 09:41:13: replaced tube Message-ID: cleaned trap From seymour at snf.stanford.edu Wed Jun 29 12:10:01 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 29 Jun 2011 12:10:01 -0700 Subject: Problem teos2 SNF 2011-06-29 12:10:01: needs test after repair Message-ID: From seymour at snf.stanford.edu Thu Jun 30 10:30:14 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 30 Jun 2011 10:30:14 -0700 Subject: Shutdown teos2 SNF 2011-06-30 10:30:14: not pumping down Message-ID: