Problem teos2 SNF 2011-06-21 15:18:15: teos replaced

seymour at snf.stanford.edu seymour at snf.stanford.edu
Tue Jun 21 15:18:15 PDT 2011


It is up to temp. The leak check was good. I flowed 300 sccm O2 and 60 sccm teos. Looks good but may want to test it. 




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