Problem teos2 SNF 2011-06-27 15:19:55: process pressure problems

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Mon Jun 27 15:19:55 PDT 2011


pressure steadily increased from 1200 to 1900 during teos2std recipe.  noticed pressure increase ~1.5 hours into deposition and it steadily increased until it was about 1900 at 2.5hrs (end of deposition).  




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