Problem teos2 SNF 2011-05-05 14:38:34: Fail Leak check and pressure rising

wangss at snf.stanford.edu wangss at snf.stanford.edu
Thu May 5 14:38:35 PDT 2011


Had two runs. First run passed leak check, but noticed a very high pressure (1900) during depostion step. Second run failed leak check. Aborted the process and put the tube in pump program.




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