Problem teos2 SNF 2011-05-05 14:38:34: Fail Leak check and pressure rising

wangss at wangss at
Thu May 5 14:38:35 PDT 2011

Had two runs. First run passed leak check, but noticed a very high pressure (1900) during depostion step. Second run failed leak check. Aborted the process and put the tube in pump program.

More information about the teos2-pcs mailing list