Problem teos2 SNF 2011-05-05 14:38:34: Fail Leak check and pressure rising

seymour at snf.stanford.edu seymour at snf.stanford.edu
Fri May 6 10:13:50 PDT 2011


cleaned pump port and pumped to base of 22 mT with a ror of 23 mT.
flowed TEOS and Oxygen to recipe setpoint and process pressure was 340 mT. Set MKSpressure to 12oo mT and system maintained 1200mT.




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