From maurice at snf.stanford.edu Fri Sep 9 13:42:44 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 Sep 2011 13:42:44 -0700 Subject: Problem teos2 SNF 2011-08-29 09:47:29: needsw test after TEOS change Message-ID: Test complete Ran TEOS2STD 00:16:00 expected ~960ang actual 954 (centerpoint) From tberg at snf.stanford.edu Mon Sep 12 08:20:48 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 12 Sep 2011 08:20:48 -0700 Subject: Shutdown teos2 SNF 2011-09-12 08:20:48: checking alarms Message-ID: From tberg at snf.stanford.edu Mon Sep 12 09:21:10 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 12 Sep 2011 09:21:10 -0700 Subject: Shutdown teos2 SNF 2011-09-12 08:20:48: checking alarms Message-ID: TEOS not source of alarms From cfchiang at snf.stanford.edu Fri Sep 16 19:52:13 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Fri, 16 Sep 2011 19:52:13 -0700 Subject: Problem teos2 SNF 2011-09-16 19:52:13: Can't run PUMP7 Message-ID: Deposition went smoothly and the deposited oxide looks good. Problem started when trying to get the tube back to standby. Tried three times the tube failed to reach reasonable base pressure and aborted PUMP7 program every single trial. Had tried vent it and re-sent the tube back in or pushed gently ... From tberg at snf.stanford.edu Mon Sep 19 08:57:07 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 19 Sep 2011 08:57:07 -0700 Subject: Comment teos2 SNF 2011-09-19 08:57:06: Rebuilding Trap Message-ID: Cleaned trap putting it back together From tberg at snf.stanford.edu Mon Sep 19 10:21:59 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 19 Sep 2011 10:21:59 -0700 Subject: Shutdown teos2 SNF 2011-09-19 10:21:58: Trap down waiting parts Message-ID: From tberg at snf.stanford.edu Mon Sep 19 13:57:17 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 19 Sep 2011 13:57:17 -0700 Subject: Comment teos2 SNF 2011-09-19 13:57:17: Insulators should be here today Message-ID: Insulators should be here today hopefully install tomorrow From tberg at snf.stanford.edu Tue Sep 20 11:38:20 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 20 Sep 2011 11:38:20 -0700 Subject: Shutdown teos2 SNF 2011-09-19 10:21:58: Trap down waiting parts Message-ID: Cleaned and rebuilt trap. Base pressure and leak rate good. tube pumps fine now From tberg at snf.stanford.edu Tue Sep 20 11:38:38 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 20 Sep 2011 11:38:38 -0700 Subject: Problem teos2 SNF 2011-09-16 19:52:13: Can't run PUMP7 Message-ID: Cleaned and rebuilt trap. Base pressure and leak rate good. tube pumps fine now From tberg at snf.stanford.edu Tue Sep 20 11:38:46 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 20 Sep 2011 11:38:46 -0700 Subject: Comment teos2 SNF 2011-09-19 08:57:06: Rebuilding Trap Message-ID: Cleaned and rebuilt trap. Base pressure and leak rate good. tube pumps fine now From tberg at snf.stanford.edu Tue Sep 20 11:39:00 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 20 Sep 2011 11:39:00 -0700 Subject: Comment teos2 SNF 2011-09-19 13:57:17: Insulators should be here today Message-ID: Cleaned and rebuilt trap. Base pressure and leak rate good. tube pumps fine now From tberg at snf.stanford.edu Tue Sep 20 11:39:27 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 20 Sep 2011 11:39:27 -0700 Subject: Comment teos2 SNF 2011-07-08 11:34:30: door may have had a closing problem Message-ID: Noted From tberg at snf.stanford.edu Tue Sep 20 11:40:00 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 20 Sep 2011 11:40:00 -0700 Subject: Comment teos2 SNF 2011-08-02 11:32:41: removed leaking water line Message-ID: New line installed pump is fine now From tberg at snf.stanford.edu Tue Sep 20 11:40:17 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 20 Sep 2011 11:40:17 -0700 Subject: Comment teos2 SNF 2011-07-11 09:08:18: tube pumping down Message-ID: Noted From cfchiang at snf.stanford.edu Wed Sep 28 20:15:21 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Wed, 28 Sep 2011 20:15:21 -0700 Subject: Comment teos2 SNF 2011-09-28 20:15:20: Deposition uniformity Message-ID: Loaded 12 wafers, one front and one rear tube dummies included, in every other slot in the rear boat. Blow lists the deposition thicknesses and standard deviations - 2nd wafer: avg = 7598 A, s.d.= 279 A 6th wafer: avg = 8179 A, s.d.= 232 A 11th wafer: avg = 8432 A, s.d.= 313 A