Problem teos2 SNF 2011-09-16 19:52:13: Can't run PUMP7

cfchiang at snf.stanford.edu cfchiang at snf.stanford.edu
Fri Sep 16 19:52:13 PDT 2011


Deposition went smoothly and the deposited oxide looks good. Problem started when trying to get the tube back to standby. Tried three times the tube failed to reach reasonable base pressure and aborted PUMP7 program every single trial. Had tried vent it and re-sent the tube back in or pushed gently ...




More information about the teos2-pcs mailing list