Comment teos2 SNF 2011-09-28 20:15:20: Deposition uniformity

cfchiang at snf.stanford.edu cfchiang at snf.stanford.edu
Wed Sep 28 20:15:21 PDT 2011


Loaded 12 wafers, one front and one rear tube dummies included, in every other slot in the rear boat. Blow lists the deposition thicknesses and standard deviations - 
  2nd wafer: avg = 7598 A, s.d.= 279 A
   6th wafer: avg = 8179 A, s.d.= 232 A
11th wafer: avg = 8432 A, s.d.= 313 A




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