From seymour at snf.stanford.edu Fri Apr 6 14:35:09 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 6 Apr 2012 14:35:09 -0700 Subject: Comment teos2 SNF 2012-04-06 14:35:09: tube is still down Message-ID: I have the mfc problems fixed by replacing a faulty I/O board. Ran TEOS2STD in auto and all gases flowed to setpoint. The problem was during deposition the MKSPRE did not go to setpoint of 1200 mT. It stayed at the partial pressure of the O2 and the TEOS flows of about 314 mT. I checked throttle valve and it closed and opened when I manually set those positions. I ran the Mfs460 in manual and gave the MKSPRE the setpoint of 1200 and it didn't change pressure. Nor did the tube alarm for pressure during the auto run. From seymour at snf.stanford.edu Wed Apr 11 13:56:02 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 11 Apr 2012 13:56:02 -0700 Subject: Problem teos2 SNF 2012-03-24 13:31:44: MFS Error Message-ID: errors have been fixed From seymour at snf.stanford.edu Wed Apr 11 13:56:47 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 11 Apr 2012 13:56:47 -0700 Subject: Shutdown teos2 SNF 2012-03-30 20:37:29: MFS Error at Step 30 Message-ID: ran teos2std in auto witgh no errors From seymour at snf.stanford.edu Wed Apr 11 13:57:21 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 11 Apr 2012 13:57:21 -0700 Subject: Comment teos2 SNF 2012-04-06 14:35:09: tube is still down Message-ID: tube ran in auto with no errors From seymour at snf.stanford.edu Wed Apr 11 13:58:03 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 11 Apr 2012 13:58:03 -0700 Subject: Problem teos2 SNF 2012-03-23 14:54:06: replaced profile t/c Message-ID: t/c was replaced and offsets entered in TCU From seymour at snf.stanford.edu Wed Apr 11 13:59:13 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 11 Apr 2012 13:59:13 -0700 Subject: Comment teos2 SNF 2011-12-02 11:59:41: I looked at the door seal problem Message-ID: door seals correctly From seymour at snf.stanford.edu Wed Apr 11 14:43:31 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 11 Apr 2012 14:43:31 -0700 Subject: Problem teos2 SNF 2012-04-11 14:43:31: needs test before release Message-ID: From seymour at snf.stanford.edu Thu Apr 19 14:37:32 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 19 Apr 2012 14:37:32 -0700 Subject: Shutdown teos2 SNF 2012-04-19 14:37:31: No O2 flow in step 30 Message-ID: O2 Mfc will not flow to setpoint. From vipin at snf.stanford.edu Thu Apr 19 14:42:42 2012 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Thu, 19 Apr 2012 14:42:42 -0700 Subject: Shutdown teos2 SNF 2012-04-19 14:42:42: MFS Alarm Message-ID: MFS Alrm at Step 30. O2 flow not detected. From seymour at snf.stanford.edu Fri Apr 20 08:47:57 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 20 Apr 2012 08:47:57 -0700 Subject: Comment teos2 SNF 2012-04-20 08:47:56: running teos2std Message-ID: loader motor not running on in command. tube in step 30 with 750 O2 setpoin,t flow 754. From seymour at snf.stanford.edu Mon Apr 23 11:18:04 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 23 Apr 2012 11:18:04 -0700 Subject: Shutdown teos2 SNF 2012-04-19 14:42:42: MFS Alarm Message-ID: ran teos2std with no flow errors From seymour at snf.stanford.edu Mon Apr 23 11:18:32 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 23 Apr 2012 11:18:32 -0700 Subject: Shutdown teos2 SNF 2012-04-19 14:37:31: No O2 flow in step 30 Message-ID: o2 flow to setpoint now From seymour at snf.stanford.edu Mon Apr 23 11:19:21 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 23 Apr 2012 11:19:21 -0700 Subject: Comment teos2 SNF 2012-04-20 08:47:56: running teos2std Message-ID: run went through with no errprs From seymour at snf.stanford.edu Mon Apr 23 11:20:28 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 23 Apr 2012 11:20:28 -0700 Subject: Shutdown teos2 SNF 2012-04-23 11:20:27: loader not going in Message-ID: bad driver board parts are on order From seymour at snf.stanford.edu Tue Apr 24 15:04:29 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 24 Apr 2012 15:04:29 -0700 Subject: Comment teos2 SNF 2012-04-24 15:04:28: loader driver board has been replaced Message-ID: From seymour at snf.stanford.edu Thu Apr 26 06:42:07 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 26 Apr 2012 06:42:07 -0700 Subject: Comment teos2 SNF 2012-04-24 15:04:28: loader driver board has been replaced Message-ID: this comment meant for sige From seymour at snf.stanford.edu Thu Apr 26 06:47:00 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 26 Apr 2012 06:47:00 -0700 Subject: Shutdown teos2 SNF 2012-04-23 11:20:27: loader not going in Message-ID: the loader broblem has been fixed. tube needs testing