From maurice at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Shutdown teos2 SNF 2012-08-09 12:09:43: TGO issue Message-ID: <30146233.93.1344539384193.JavaMail.coral@shine> From maurice at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Shutdown teos2 SNF 2012-08-09 12:09:43: TGO issue Message-ID: <29739466.13.1344892840029.JavaMail.coral@shine> After swapping out parts and changing our version of software, Calcon has the CL96 communicating with the rest of the TGO system. From taotang at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: taotang at snf.stanford.edu (taotang at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Comment teos2 SNF 2012-08-15 08:53:56: MFS error and leak check Message-ID: <2974879.50.1345046036951.JavaMail.coral@shine> The system showed MFS ERROR twice and leak check fault twice. I tried to push the door towards the tube for several times, and it passed leak check. From maurice at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Problem teos2 SNF 2012-08-15 15:48:59: Pump7 aborting Message-ID: <12919813.59.1345070939456.JavaMail.coral@shine> User reports tube is kicking out of pump program From seymour at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Problem teos2 SNF 2012-08-15 15:48:59: Pump7 aborting Message-ID: <6638664.76.1345135287019.JavaMail.coral@shine> tube base pressure. door not sealing. adjusted loader drive tension. found process pressure high with 5oo sccm of N2. cleaned pump port changed orings and process ppressure with 500 sccm N2 is now 355 mT. Running pump7. From maurice at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Shutdown teos2 SNF 2012-08-17 16:34:52: element braker off Message-ID: <23047627.181.1345246492813.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Shutdown teos2 SNF 2012-08-17 16:34:52: element braker off Message-ID: <25994851.0.1345554584820.JavaMail.coral@shine> breaker back on From mislam at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Problem teos2 SNF 2012-08-25 14:36:26: Door Interlock Message-ID: <25823246.173.1345930587211.JavaMail.coral@shine> Won't pumpdown, it showing door interlock active From seymour at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Problem teos2 SNF 2012-08-25 14:36:26: Door Interlock Message-ID: <12804443.10.1346079327931.JavaMail.coral@shine> I found the tool in ready to run pump7. I pushed run and it pumped dopwn to crossover and when N2 came on the pressure went way up. I pumped it again in manual and turned on 500 sccm N2 and pressure went to 1150 mT. I open and closed throttle valve and pressure went down to 370 mT. Pumped N2 for a while and checkled base it was 11 mT and leak rate was good. tube pumping N2 in pump7 From eldwin at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Problem teos2 SNF 2012-09-05 11:13:38: MFS alarm, steps skipped Message-ID: <27014726.37.1346868818690.JavaMail.coral@shine> 1) MFS alarm goes off during the deposition stabilization step. Had to retry many times before it worked. 2) Near the end of the deposition program TEOS2STD, the 30 min vent step is skipped and the tube does not boat out automatically and had to be manually boated out. 3) Pump program does not hold tube in vacuum standby. Program ends and alarms. From tberg at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Comment teos2 SNF 2012-09-05 12:34:07: System pumped down fin and is in PUMP7 Message-ID: <16418944.40.1346873657963.JavaMail.coral@shine> System pumped down fin and is in PUMP7. Not sure what MFS alarms were happening. will keep open for observation From ahn1229 at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: ahn1229 at snf.stanford.edu (ahn1229 at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Problem teos2 SNF 2012-09-06 15:43:52: failed 'leak check' (step 45) twice Message-ID: <15928921.61.1346971433680.JavaMail.coral@shine> failed the 'leak check' twice, and finally passed it at the 3rd try. 1) step 30 (stabilize) / 18:00 got 'MFS Alarm' during the first couple of minutes of the step. The alarm's gone after 4-7 mins, and start to flow O2 gas. @ 1st try, alarm's gone at remaining time about 12:00 @ 2nd try, it's gone at about 14:05 (pressure 1686) @ 3rd try, it's gone at about 14:23 (pressure 1627) 2) step 35 (initial pump down) / 2:00 pressure drop from xxxx --> xxxxx @ 1st try, ???? ---> 120.4 @ 2nd try, 1677 --> 67.5 @ 3rd try, 1628 --> 38.5 3) step 40 (pump down) / 4:00 @ 1st,2nd,3rd try, it was remaining at the lowest level. 4) step 45 (leak check) / 1:00 @ 1st, 2nd try, it failed to pass the leak check (pressure >60) @ 3rd, pressure went up to 58.5, barely pass the leak check. From ysyang88 at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: ysyang88 at snf.stanford.edu (ysyang88 at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Problem teos2 SNF 2012-09-12 19:57:43: TEOS level low (currently at 15) Message-ID: <17760022.128.1347505064402.JavaMail.coral@shine> From ysyang88 at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: ysyang88 at snf.stanford.edu (ysyang88 at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Problem teos2 SNF 2012-09-12 22:42:20: Chamber pressure not pumping down Message-ID: <4777779.129.1347514940825.JavaMail.coral@shine> PRCPR remains at 2000 during all process steps (both teos2std and pump7). Tried running PUMP7 program and hold at step 10 (pump down step) for 40 minutes, pressure still remains at 2000 afterwards. From tberg at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Shutdown teos2 SNF 2012-09-13 06:26:28: teos canister empty Message-ID: <2602476.131.1347542788753.JavaMail.coral@shine> From seymour at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Problem teos2 SNF 2012-09-06 15:43:52: failed 'leak check' (step 45) twice Message-ID: <30160758.146.1347572163248.JavaMail.coral@shine> pumps good now From seymour at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Problem teos2 SNF 2012-09-12 19:57:43: TEOS level low (currently at 15) Message-ID: <8406863.147.1347572198268.JavaMail.coral@shine> replaced TEOS canister, and its up to temp. From seymour at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Problem teos2 SNF 2012-09-12 22:42:20: Chamber pressure not pumping down Message-ID: <7132237.148.1347572239300.JavaMail.coral@shine> tube base was 11 mT and rate of rise was good. From seymour at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Shutdown teos2 SNF 2012-09-13 06:26:28: teos canister empty Message-ID: <24518334.149.1347572364320.JavaMail.coral@shine> cannister changed and up to temp. Cleaned slo pump valve and throttle valve. Pumps down good and leak check good. From seymour at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Problem teos2 SNF 2012-09-05 11:13:38: MFS alarm, steps skipped Message-ID: <14336100.150.1347572476342.JavaMail.coral@shine> I didn't see any mfs alarms and pump recipe running and tube based at 11 mT From maurice at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Comment teos2 SNF 2012-09-14 11:06:39: Corrected program:TEOS2STD Message-ID: <33104079.5.1347646000046.JavaMail.coral@shine> There was a missing If/then step in the program that forced recipe to always go to the abort step after the deposition was complete. Step 115 now reads: Step 110.0015 IF TEMPL<680 THE GOTO 0125 From eldwin at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Problem teos2 SNF 2012-10-30 23:41:05: TEOS level low Message-ID: <21975655.93.1351665665902.JavaMail.coral@shine> Could we have the canister replaced? Will unload wafers in the current run by 9am. Thanks! From tberg at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Comment teos2 SNF 2012-10-31 07:14:51: Turned off source heater and closed TEOS Message-ID: <13183837.95.1351692891780.JavaMail.coral@shine> Turned off source heater and closed TEOS valve for replacement From seymour at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Problem teos2 SNF 2012-10-30 23:41:05: TEOS level low Message-ID: <30096156.105.1351697829215.JavaMail.coral@shine> changed TEOS container. It is heating up to operating temp at this time. From seymour at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Comment teos2 SNF 2012-10-31 07:14:51: Turned off source heater and closed TEOS Message-ID: <23781850.106.1351697877253.JavaMail.coral@shine> source heating up From seymour at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Comment teos2 SNF 2012-10-31 10:13:01: teos canister replaced Message-ID: <13691752.110.1351703582521.JavaMail.coral@shine> good base pressure and ror. Flowed TEOS at setpoint. From seymour at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Shutdown teos2 SNF 2012-12-04 07:36:29: tube not pumping down Message-ID: <22942874.47.1354635390442.JavaMail.coral@shine> cooling tube down to troubleshoot problem From seymour at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Shutdown teos2 SNF 2012-12-04 07:36:29: tube not pumping down Message-ID: <12973160.5.1355165627432.JavaMail.coral@shine> changed tube rebuilt loader. passed cold and hot leak check. running tube coat at this time. From seymour at snf.stanford.edu Sun Dec 23 09:24:46 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:24:46 -0000 Subject: Comment teos2 SNF 2012-12-14 07:07:05: checked system operation Message-ID: <25033969.9.1355497626444.JavaMail.coral@shine> Base pressure was 8 mT leak rate was 10 mT/min process pressure with 500 N2 was 364 mT process pressure with 2000 N2 was 864 mT proxess pressure with a MKSpressure set at 1200 mT was 1160 with 5oo N2 and 2000 N2