Problem teos2 SNF 2012-08-15 15:48:59: Pump7 aborting

seymour at snf.stanford.edu seymour at snf.stanford.edu
Sun Dec 23 09:24:46 PST 2012


tube base pressure. door not sealing. adjusted loader drive tension.
found process pressure high with 5oo sccm of N2. cleaned pump port 
changed orings and process ppressure with 500 sccm N2 is now 355 mT. Running pump7.



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