Problem teos2 SNF 2012-09-05 11:13:38: MFS alarm, steps skipped

eldwin at eldwin at
Sun Dec 23 09:24:46 PST 2012

1) MFS alarm goes off during the deposition stabilization step. Had to retry many times before it worked. 
2) Near the end of the deposition program TEOS2STD, the 30 min vent step is skipped and the tube does not boat out automatically and had to be manually boated out.
3) Pump program does not hold tube in vacuum standby. Program ends and alarms.

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