Problem teos2 SNF 2012-09-12 22:42:20: Chamber pressure not pumping down

ysyang88 at snf.stanford.edu ysyang88 at snf.stanford.edu
Sun Dec 23 09:24:46 PST 2012


PRCPR remains at 2000 during all process steps (both teos2std and pump7). Tried running PUMP7 program and hold at step 10 (pump down step) for 40 minutes, pressure still remains at 2000 afterwards.   



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