Problem teos2 SNF 2012-09-12 22:42:20: Chamber pressure not pumping down

ysyang88 at ysyang88 at
Sun Dec 23 09:24:46 PST 2012

PRCPR remains at 2000 during all process steps (both teos2std and pump7). Tried running PUMP7 program and hold at step 10 (pump down step) for 40 minutes, pressure still remains at 2000 afterwards.   

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