Comment teos2 SNF 2012-09-14 11:06:39: Corrected program:TEOS2STD
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Sun Dec 23 09:24:46 PST 2012
There was a missing If/then step in the program that forced recipe to always go to the abort step after the deposition was complete.
Step 115 now reads:
Step 110.0015 IF TEMPL<680 THE GOTO 0125
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