Comment teos2 SNF 2012-12-14 07:07:05: checked system operation

seymour at snf.stanford.edu seymour at snf.stanford.edu
Sun Dec 23 09:24:46 PST 2012


Base pressure was 8 mT
leak rate was 10 mT/min
process pressure with 500 N2 was 364 mT
process pressure with 2000 N2 was 864 mT
proxess pressure with a MKSpressure set at 1200 mT was 1160 with 5oo N2 and 2000 N2



More information about the teos2-pcs mailing list