From mislam at snf.stanford.edu  Sat Mar 10 11:36:33 2012
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Sat, 10 Mar 2012 11:36:33 -0800
Subject: Problem teos2 SNF 2012-03-10 11:36:32: MFS Error - N2LO Leak
Message-ID: <mailman.969.1356283494.4766.teos2-pcs@snf.stanford.edu>

Error ocurred while tube was out laoding wafers.



From mislam at snf.stanford.edu  Sat Mar 10 12:09:37 2012
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Sat, 10 Mar 2012 12:09:37 -0800
Subject: Problem teos2 SNF 2012-03-10 12:09:37: Tube is at atmosphere
Message-ID: <mailman.970.1356283494.4766.teos2-pcs@snf.stanford.edu>

PUMP7 recipe terminates, won't pump down



From seymour at snf.stanford.edu  Mon Mar 12 10:35:58 2012
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 12 Mar 2012 10:35:58 -0700
Subject: Problem teos2 SNF 2012-03-10 12:09:37: Tube is at atmosphere
Message-ID: <mailman.971.1356283494.4766.teos2-pcs@snf.stanford.edu>

tube pumped down to 20 mT after door closed completly



From mislam at snf.stanford.edu  Wed Mar 14 21:40:24 2012
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Wed, 14 Mar 2012 21:40:24 -0700
Subject: Shutdown teos2 SNF 2012-03-14 21:40:24: Same problem as reported earlier
Message-ID: <mailman.972.1356283494.4766.teos2-pcs@snf.stanford.edu>

MFS Error - Fuction 7



From seymour at snf.stanford.edu  Thu Mar 15 07:28:35 2012
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Thu, 15 Mar 2012 07:28:35 -0700
Subject: Problem teos2 SNF 2012-03-10 11:36:32: MFS Error - N2LO Leak
Message-ID: <mailman.973.1356283494.4766.teos2-pcs@snf.stanford.edu>

no errors found when i check tool on 3/11



From seymour at snf.stanford.edu  Fri Mar 23 14:51:55 2012
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 23 Mar 2012 14:51:55 -0700
Subject: Shutdown teos2 SNF 2012-03-14 21:40:24: Same problem as reported earlier
Message-ID: <mailman.974.1356283494.4766.teos2-pcs@snf.stanford.edu>

trube not pumping down. replaced gas ring orings. tube had high base pressure, replaced all orings in rear of tube. tube base and ror good.
loader door seal problems. heated system up and found front zone t/c open.



From seymour at snf.stanford.edu  Fri Mar 23 14:54:06 2012
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 23 Mar 2012 14:54:06 -0700
Subject: Problem teos2 SNF 2012-03-23 14:54:06: replaced profile t/c
Message-ID: <mailman.975.1356283494.4766.teos2-pcs@snf.stanford.edu>

entered correction values. heating tube up..door may need slight push to seal when starting pumpdown. I will address that on monday



From mislam at snf.stanford.edu  Sat Mar 24 13:31:44 2012
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Sat, 24 Mar 2012 13:31:44 -0700
Subject: Problem teos2 SNF 2012-03-24 13:31:44: MFS Error
Message-ID: <mailman.976.1356283494.4766.teos2-pcs@snf.stanford.edu>




From mislam at snf.stanford.edu  Fri Mar 30 20:37:29 2012
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Fri, 30 Mar 2012 20:37:29 -0700
Subject: Shutdown teos2 SNF 2012-03-30 20:37:29: MFS Error at Step 30
Message-ID: <mailman.977.1356283494.4766.teos2-pcs@snf.stanford.edu>

Running TESO2STD, at the start of step 30 MFS Error came one, Controler in the back shows "O2 Interlock" error, no blinking light on front panel. All gas shows no flow.