From tberg at snf.stanford.edu  Thu May  3 06:03:13 2012
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 3 May 2012 06:03:13 -0700
Subject: Shutdown teos2 SNF 2012-05-03 06:03:12: burnbox
Message-ID: <mailman.995.1356283494.4766.teos2-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Wed May 23 07:57:36 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 23 May 2012 07:57:36 -0700
Subject: Comment teos2 SNF 2012-05-23 07:57:36: running a qual test
Message-ID: <mailman.996.1356283494.4766.teos2-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Wed May 23 08:45:38 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 23 May 2012 08:45:38 -0700
Subject: Shutdown teos2 SNF 2012-05-23 08:45:37: MFS   O2 interlock
Message-ID: <mailman.997.1356283494.4766.teos2-pcs@snf.stanford.edu>

O2 interlock in step 30



From maurice at snf.stanford.edu  Wed May 23 15:36:25 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 23 May 2012 15:36:25 -0700
Subject: Shutdown teos2 SNF 2012-05-23 08:45:37: MFS   O2 interlock
Message-ID: <mailman.998.1356283494.4766.teos2-pcs@snf.stanford.edu>

Ray fixed it



From maurice at snf.stanford.edu  Wed May 23 15:37:17 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 23 May 2012 15:37:17 -0700
Subject: Comment teos2 SNF 2012-05-23 07:57:36: running a qual test
Message-ID: <mailman.999.1356283494.4766.teos2-pcs@snf.stanford.edu>

ans Teos2std  0016:00
expected ~1000ang
Actually 1264 ang



From maurice at snf.stanford.edu  Thu May 24 15:56:56 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Thu, 24 May 2012 15:56:56 -0700
Subject: Shutdown teos2 SNF 2012-05-03 06:03:12: burnbox
Message-ID: <mailman.1000.1356283494.4766.teos2-pcs@snf.stanford.edu>

There is a new Teos2 disk.  It currently has 2 recipes.
TEOS2STD
PUMP7
If you need additional recipes let me know. 
-
These recipes have an addition abort step added.  If the tube is disabled or if the burnbox fails in a step that has O2  or Teos then the recipe will abort, shut off process gases (O2, Teos), Turn off the generator, pump for 5 min and then hold in N2.  The hold step is called "ABORT PURGE/HOLD".  You will now know that your process was interrupted. Pressing alarm ack  twice will release the recipe hold, purge the tube in N2, and then vent the tube.
Please contact me or Ted if any of this is not clear.
-m



From maurice at snf.stanford.edu  Thu May 24 16:02:35 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Thu, 24 May 2012 16:02:35 -0700
Subject: Problem teos2 SNF 2012-04-11 14:43:31: needs test before release
Message-ID: <mailman.1001.1356283494.4766.teos2-pcs@snf.stanford.edu>

Ran Teos2std  0016:00
expected ~1000ang
Actually 1264 ang



From vipin at snf.stanford.edu  Wed May 30 15:56:02 2012
From: vipin at snf.stanford.edu (vipin at snf.stanford.edu)
Date: Wed, 30 May 2012 15:56:02 -0700
Subject: Comment teos2 SNF 2012-05-30 15:56:01: wafer piece
Message-ID: <mailman.1002.1356283494.4766.teos2-pcs@snf.stanford.edu>

wafer piece fell inside the tube. The wafer only has a thin 10 nm layer of carbon on it.