From ofaolain at stanford.edu  Fri Mar  8 10:27:33 2013
From: ofaolain at stanford.edu (ofaolain at stanford.edu)
Date: Fri, 8 Mar 2013 10:27:33 -0800 (PST)
Subject: [teos2-pcs] Problem teos2 SNF 2013-03-08 10:27:33: TEOS Level at 15%
Message-ID: <27977188.113.1362767253741.JavaMail.coral@snc-coraldb.stanford.edu>


From tberg at stanford.edu  Fri Mar  8 10:57:59 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Fri, 8 Mar 2013 10:57:59 -0800 (PST)
Subject: [teos2-pcs] Shutdown teos2 SNF 2013-03-08 10:57:58: teos empty
Message-ID: <16800077.114.1362769079338.JavaMail.coral@snc-coraldb.stanford.edu>


From rseymour at stanford.edu  Fri Mar  8 11:57:10 2013
From: rseymour at stanford.edu (rseymour at stanford.edu)
Date: Fri, 8 Mar 2013 11:57:10 -0800 (PST)
Subject: [teos2-pcs] Comment teos2 SNF 2013-03-08 11:57:10: changing TEOS
	container
Message-ID: <21362147.0.1362772631012.JavaMail.coral@snc-coraldb.stanford.edu>


From rseymour at stanford.edu  Fri Mar  8 13:40:49 2013
From: rseymour at stanford.edu (rseymour at stanford.edu)
Date: Fri, 8 Mar 2013 13:40:49 -0800 (PST)
Subject: [teos2-pcs] Shutdown teos2 SNF 2013-03-08 10:57:58: teos empty
Message-ID: <2849753.1.1362778849328.JavaMail.coral@snc-coraldb.stanford.edu>

replaced TEOS source

From rseymour at stanford.edu  Fri Mar  8 13:41:13 2013
From: rseymour at stanford.edu (rseymour at stanford.edu)
Date: Fri, 8 Mar 2013 13:41:13 -0800 (PST)
Subject: [teos2-pcs] Problem teos2 SNF 2013-03-08 10:27:33: TEOS Level
	at 15%
Message-ID: <20322622.2.1362778873390.JavaMail.coral@snc-coraldb.stanford.edu>

replaced TEOS source

From rseymour at stanford.edu  Fri Mar  8 13:43:46 2013
From: rseymour at stanford.edu (rseymour at stanford.edu)
Date: Fri, 8 Mar 2013 13:43:46 -0800 (PST)
Subject: [teos2-pcs] Comment teos2 SNF 2013-03-08 13:43:46: changed TEOS
Message-ID: <16785420.3.1362779026703.JavaMail.coral@snc-coraldb.stanford.edu>

the base pressure was 6 mT and ror was 12 mT/min.
flowed TEOS at setpoint of 65 sccm.
checked pressure contol at 1000 mT.
all was good

From rseymour at stanford.edu  Mon Mar 25 13:58:49 2013
From: rseymour at stanford.edu (rseymour at stanford.edu)
Date: Mon, 25 Mar 2013 13:58:49 -0700 (PDT)
Subject: [teos2-pcs] Shutdown teos2 SNF 2013-03-25 13:58:49: tycom won't
	read disks
Message-ID: <13823581.29.1364245129568.JavaMail.coral@snc-coraldb.stanford.edu>


From rseymour at stanford.edu  Wed Mar 27 10:26:48 2013
From: rseymour at stanford.edu (rseymour at stanford.edu)
Date: Wed, 27 Mar 2013 10:26:48 -0700 (PDT)
Subject: [teos2-pcs] Shutdown teos2 SNF 2013-03-25 13:58:49: tycom won't
	read disks
Message-ID: <1702990.3.1364405208543.JavaMail.coral@snc-coraldb.stanford.edu>

disk drive replaced