From aeonia at stanford.edu  Mon Feb 13 17:32:11 2006
From: aeonia at stanford.edu (Hyeun-Su Kim)
Date: Mon, 13 Feb 2006 17:32:11 -0800
Subject: [TEOS2] Long reservation this week
Message-ID: <200602140132.k1E1W75j015352@smtp2.Stanford.EDU>

Dear TEOS2 users,

 

I have a thick teos deposition process upcoming and made 10 long
reservations this week. Please let me know if you have to use this machine
this week, so that we can adjust the schedules if needed. I apologize for
the long reservations.

 

Thank you.

Hyeun-su (aeonia)

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From robinhmb at yahoo.com  Tue Feb 14 00:16:54 2006
From: robinhmb at yahoo.com (Robin King)
Date: Tue, 14 Feb 2006 00:16:54 -0800 (PST)
Subject: [TEOS2] Long reservation this week
In-Reply-To: <200602140132.k1E1W75j015352@smtp2.Stanford.EDU>
Message-ID: <20060214081654.73971.qmail@web54711.mail.yahoo.com>

Hi Hyeun-su,

Thanks for the advanced notice.  Could you please tell us how thick
your total depositions will be and whether it will necessitate a tube
clean?  How long are your reservations?
Also, can you please use the tube during non-prime hours to free up
the equipment for folks who need it for regular processing?

Thanks,
Robin King
IBM

--- Hyeun-Su Kim <aeonia at stanford.edu> wrote:

> Dear TEOS2 users,
> 
>  
> 
> I have a thick teos deposition process upcoming and made 10 long
> reservations this week. Please let me know if you have to use this
> machine
> this week, so that we can adjust the schedules if needed. I
> apologize for
> the long reservations.
> 
>  
> 
> Thank you.
> 
> Hyeun-su (aeonia)
> 
> 


__________________________________________________
Do You Yahoo!?
Tired of spam?  Yahoo! Mail has the best spam protection around 
http://mail.yahoo.com 


From aeonia at stanford.edu  Tue Feb 14 11:14:23 2006
From: aeonia at stanford.edu (Hyeun-Su Kim)
Date: Tue, 14 Feb 2006 11:14:23 -0800
Subject: [TEOS2] Long reservation this week
In-Reply-To: <20060214081654.73971.qmail@web54711.mail.yahoo.com>
Message-ID: <200602141914.k1EJEJ04031725@smtp2.Stanford.EDU>

Hi Robin and all,

The total thickness I will deposit is 10um. The tube thickness is 5um now
and the tube cleaning will be at 40um. (Maurice, if I am wrong, please
correct it to the exact number) So, we have 25um more to go after my
deposition.

The source may be depleted during my deposition, but it won't be a problem
as long as they have more.

I am going to take two slots a day. 10 hours from midnight to 10am and
9hours from 12:30pm to 9:30pm. However, I am willing to give the reserved
slot if anybody needs it. Just let me know in one day advance.

I apologize for the inconvenience again, and thank you much.
Hyeun-su (aeonia)

-----Original Message-----
From: Robin King [mailto:robinhmb at yahoo.com] 
Sent: Tuesday, February 14, 2006 12:17 AM
To: Hyeun-Su Kim; teos2 at snf.stanford.edu; rsshenoy at us.ibm.com
Subject: Re: [TEOS2] Long reservation this week

Hi Hyeun-su,

Thanks for the advanced notice.  Could you please tell us how thick
your total depositions will be and whether it will necessitate a tube
clean?  How long are your reservations?
Also, can you please use the tube during non-prime hours to free up
the equipment for folks who need it for regular processing?

Thanks,
Robin King
IBM

--- Hyeun-Su Kim <aeonia at stanford.edu> wrote:

> Dear TEOS2 users,
> 
>  
> 
> I have a thick teos deposition process upcoming and made 10 long
> reservations this week. Please let me know if you have to use this
> machine
> this week, so that we can adjust the schedules if needed. I
> apologize for
> the long reservations.
> 
>  
> 
> Thank you.
> 
> Hyeun-su (aeonia)
> 
> 


__________________________________________________
Do You Yahoo!?
Tired of spam?  Yahoo! Mail has the best spam protection around 
http://mail.yahoo.com 




From tberg at snf.stanford.edu  Tue Feb 14 11:20:39 2006
From: tberg at snf.stanford.edu (Ted Berg)
Date: Tue, 14 Feb 2006 11:20:39 -0800
Subject: [TEOS2] Long reservation this week
In-Reply-To: <200602141914.k1EJEJ04031725@smtp2.Stanford.EDU>
References: <200602141914.k1EJEJ04031725@smtp2.Stanford.EDU>
Message-ID: <43F22D87.6060203@snf.stanford.edu>

Hyeun-Su Kim and otherTEOS users,
     we will be pulling the Tube at 50 microns. As far as Rohits 
question about will it be the same after pull and clean, It should be 
very close but there may also be an effect of coating so small tweeks 
may be necessary. Is this long dep going to be something that happens 
often or will it be  aone time thing?ted


Hyeun-Su Kim wrote:

>Hi Robin and all,
>
>The total thickness I will deposit is 10um. The tube thickness is 5um now
>and the tube cleaning will be at 40um. (Maurice, if I am wrong, please
>correct it to the exact number) So, we have 25um more to go after my
>deposition.
>
>The source may be depleted during my deposition, but it won't be a problem
>as long as they have more.
>
>I am going to take two slots a day. 10 hours from midnight to 10am and
>9hours from 12:30pm to 9:30pm. However, I am willing to give the reserved
>slot if anybody needs it. Just let me know in one day advance.
>
>I apologize for the inconvenience again, and thank you much.
>Hyeun-su (aeonia)
>
>-----Original Message-----
>From: Robin King [mailto:robinhmb at yahoo.com] 
>Sent: Tuesday, February 14, 2006 12:17 AM
>To: Hyeun-Su Kim; teos2 at snf.stanford.edu; rsshenoy at us.ibm.com
>Subject: Re: [TEOS2] Long reservation this week
>
>Hi Hyeun-su,
>
>Thanks for the advanced notice.  Could you please tell us how thick
>your total depositions will be and whether it will necessitate a tube
>clean?  How long are your reservations?
>Also, can you please use the tube during non-prime hours to free up
>the equipment for folks who need it for regular processing?
>
>Thanks,
>Robin King
>IBM
>
>--- Hyeun-Su Kim <aeonia at stanford.edu> wrote:
>
>  
>
>>Dear TEOS2 users,
>>
>> 
>>
>>I have a thick teos deposition process upcoming and made 10 long
>>reservations this week. Please let me know if you have to use this
>>machine
>>this week, so that we can adjust the schedules if needed. I
>>apologize for
>>the long reservations.
>>
>> 
>>
>>Thank you.
>>
>>Hyeun-su (aeonia)
>>
>>
>>    
>>
>
>
>__________________________________________________
>Do You Yahoo!?
>Tired of spam?  Yahoo! Mail has the best spam protection around 
>http://mail.yahoo.com 
>
>  
>

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From aeonia at stanford.edu  Tue Feb 14 11:29:49 2006
From: aeonia at stanford.edu (Hyeun-Su Kim)
Date: Tue, 14 Feb 2006 11:29:49 -0800
Subject: [TEOS2] Long reservation this week
In-Reply-To: <43F22D87.6060203@snf.stanford.edu>
Message-ID: <200602141929.k1EJTj7K006373@smtp2.Stanford.EDU>

I hope this ends up as one time event. However, there is some chance for one
more run (at most).

Thank you.

  _____  

From: Ted Berg [mailto:tberg at snf.stanford.edu] 
Sent: Tuesday, February 14, 2006 11:21 AM
To: Hyeun-Su Kim
Cc: 'Robin King'; maurice at stanford.edu; teos2 at snf.stanford.edu
Subject: Re: [TEOS2] Long reservation this week

 

Hyeun-Su Kim and otherTEOS users,
     we will be pulling the Tube at 50 microns. As far as Rohits question
about will it be the same after pull and clean, It should be very close but
there may also be an effect of coating so small tweeks may be necessary. Is
this long dep going to be something that happens often or will it be  aone
time thing?ted


Hyeun-Su Kim wrote:



Hi Robin and all,
 
The total thickness I will deposit is 10um. The tube thickness is 5um now
and the tube cleaning will be at 40um. (Maurice, if I am wrong, please
correct it to the exact number) So, we have 25um more to go after my
deposition.
 
The source may be depleted during my deposition, but it won't be a problem
as long as they have more.
 
I am going to take two slots a day. 10 hours from midnight to 10am and
9hours from 12:30pm to 9:30pm. However, I am willing to give the reserved
slot if anybody needs it. Just let me know in one day advance.
 
I apologize for the inconvenience again, and thank you much.
Hyeun-su (aeonia)
 
-----Original Message-----
From: Robin King [mailto:robinhmb at yahoo.com] 
Sent: Tuesday, February 14, 2006 12:17 AM
To: Hyeun-Su Kim; teos2 at snf.stanford.edu; rsshenoy at us.ibm.com
Subject: Re: [TEOS2] Long reservation this week
 
Hi Hyeun-su,
 
Thanks for the advanced notice.  Could you please tell us how thick
your total depositions will be and whether it will necessitate a tube
clean?  How long are your reservations?
Also, can you please use the tube during non-prime hours to free up
the equipment for folks who need it for regular processing?
 
Thanks,
Robin King
IBM
 
--- Hyeun-Su Kim  <mailto:aeonia at stanford.edu> <aeonia at stanford.edu> wrote:
 
  

Dear TEOS2 users,
 
 
 
I have a thick teos deposition process upcoming and made 10 long
reservations this week. Please let me know if you have to use this
machine
this week, so that we can adjust the schedules if needed. I
apologize for
the long reservations.
 
 
 
Thank you.
 
Hyeun-su (aeonia)
 
 
    

 
 
__________________________________________________
Do You Yahoo!?
Tired of spam?  Yahoo! Mail has the best spam protection around 
http://mail.yahoo.com 
 
  

 

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From maurice at stanford.edu  Fri Feb 17 17:23:32 2006
From: maurice at stanford.edu (Maurice Stevens)
Date: Fri, 17 Feb 2006 17:23:32 -0800
Subject: No long Teos  runs
Message-ID: <43F67714.9060009@stanford.edu>

Keep depositions short (less than 2500ang) until we get another tank of Teos.
We are currently using our last tank of Teos.  
It will last less than 3 micron of deposition.
We don't expect another tank for 2 weeks.

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278