[TEOS2] Long reservation this week
aeonia at stanford.edu
Tue Feb 14 11:14:23 PST 2006
Hi Robin and all,
The total thickness I will deposit is 10um. The tube thickness is 5um now
and the tube cleaning will be at 40um. (Maurice, if I am wrong, please
correct it to the exact number) So, we have 25um more to go after my
The source may be depleted during my deposition, but it won't be a problem
as long as they have more.
I am going to take two slots a day. 10 hours from midnight to 10am and
9hours from 12:30pm to 9:30pm. However, I am willing to give the reserved
slot if anybody needs it. Just let me know in one day advance.
I apologize for the inconvenience again, and thank you much.
From: Robin King [mailto:robinhmb at yahoo.com]
Sent: Tuesday, February 14, 2006 12:17 AM
To: Hyeun-Su Kim; teos2 at snf.stanford.edu; rsshenoy at us.ibm.com
Subject: Re: [TEOS2] Long reservation this week
Thanks for the advanced notice. Could you please tell us how thick
your total depositions will be and whether it will necessitate a tube
clean? How long are your reservations?
Also, can you please use the tube during non-prime hours to free up
the equipment for folks who need it for regular processing?
--- Hyeun-Su Kim <aeonia at stanford.edu> wrote:
> Dear TEOS2 users,
> I have a thick teos deposition process upcoming and made 10 long
> reservations this week. Please let me know if you have to use this
> this week, so that we can adjust the schedules if needed. I
> apologize for
> the long reservations.
> Thank you.
> Hyeun-su (aeonia)
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