From tberg at snf.stanford.edu  Fri Jun  2 10:59:10 2006
From: tberg at snf.stanford.edu (Ted Berg)
Date: Fri, 02 Jun 2006 10:59:10 -0700
Subject: Progress on leak
Message-ID: <44807C6E.1030807@snf.stanford.edu>

Tubes were sent out for repair and shold be bac today tube will be 
installed and leak checked. Hopefully it will be functional then.


From maurice at stanford.edu  Mon Jun  5 17:58:05 2006
From: maurice at stanford.edu (Maurice Stevens)
Date: Mon, 05 Jun 2006 17:58:05 -0700
Subject: Teos up
Message-ID: <4484D31D.9000101@stanford.edu>

Dep rate normal  test complete
00:16:00
~1000Ang

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From kupnik at stanford.edu  Tue Jun  6 16:37:27 2006
From: kupnik at stanford.edu (Mario Kupnik)
Date: Tue, 6 Jun 2006 15:37:27 -0800
Subject: wafers are in the tube
Message-ID: <006001c689c2$2bd9e9c0$6601a8c0@NBKUP>


Hi,
 
we have wafers in the teos tube and would like to let them over 
night inside until 10 am because no furnace was free for annealing.
 
Please let me know if you want to use the tube this night and then we
can unload them.
 
Thanks 
 
Mario




From maurice at stanford.edu  Tue Jun  6 18:07:32 2006
From: maurice at stanford.edu (Maurice Stevens)
Date: Tue, 06 Jun 2006 18:07:32 -0700
Subject: burnbox overpressure/tylan LPCVD's down
Message-ID: <448626D4.20009@stanford.edu>

The burnnbox was showing +5 on the pressure guage. The burnbox has been 
red lighted (which orange lighted all the tylan LPCVDs).

-m


-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From maurice at snf.stanford.edu  Wed Jun  7 09:45:02 2006
From: maurice at snf.stanford.edu (Maurice Stevens)
Date: Wed, 07 Jun 2006 09:45:02 -0700
Subject: burnbox cleaned/tylan LPCVD'sup
In-Reply-To: <448626D4.20009@stanford.edu>
References: <448626D4.20009@stanford.edu>
Message-ID: <4487028E.5080509@snf.stanford.edu>

Burnbox cleaned...tylanLPCVDs are up.

Maurice Stevens wrote:

> The burnnbox was showing +5 on the pressure guage. The burnbox has 
> been red lighted (which orange lighted all the tylan LPCVDs).
>
> -m
>
>

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278