Teos up

maurice stevens maurice at stanford.edu
Thu Feb 22 10:31:57 PST 2007

 From Mike D. :

Tube port cleaned out. Gate valve cleaned. Throttle valve
cleaned. Ran TEOS2VH and all flows were good. Ready
for use!

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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