From maurice at stanford.edu  Fri Jun 15 17:24:18 2007
From: maurice at stanford.edu (maurice stevens)
Date: Fri, 15 Jun 2007 17:24:18 -0700
Subject: 3 hr Deposition ran ok
Message-ID: <46732DB2.7040906@stanford.edu>

We ran 3 hour Teos dep (thanks Mike and Ted).  Pressure and Teos flow ok 
during entire run.

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From maurice at stanford.edu  Thu Jun 28 09:50:08 2007
From: maurice at stanford.edu (maurice stevens)
Date: Thu, 28 Jun 2007 09:50:08 -0700
Subject: Teos2 yellow lighted/gas flow control issue
Message-ID: <4683E6C0.3090501@stanford.edu>

System will be yellow lighted.  The teos flow controller flows the 
correct value during deposition.  But it falsely displays a flow when 
out of the deposition step. 

A new teos MFC has been ordered...it should arrave in 4 weeks.

Speak with Ted or Maurice before using .  We want to make sure you 
understand the issue.

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278