3 hr Deposition ran ok

maurice stevens maurice at stanford.edu
Fri Jun 15 17:24:18 PDT 2007


We ran 3 hour Teos dep (thanks Mike and Ted).  Pressure and Teos flow ok 
during entire run.

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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