3 hr Deposition ran ok

maurice stevens maurice at stanford.edu
Fri Jun 15 17:24:18 PDT 2007

We ran 3 hour Teos dep (thanks Mike and Ted).  Pressure and Teos flow ok 
during entire run.

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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