Teos2 yellow lighted/gas flow control issue

maurice stevens maurice at stanford.edu
Thu Jun 28 09:50:08 PDT 2007


System will be yellow lighted.  The teos flow controller flows the 
correct value during deposition.  But it falsely displays a flow when 
out of the deposition step. 

A new teos MFC has been ordered...it should arrave in 4 weeks.

Speak with Ted or Maurice before using .  We want to make sure you 
understand the issue.

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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