New easy TEOS2STD recipe

maurice stevens maurice at
Wed Mar 4 11:02:03 PST 2009

maurice at wrote:
> I have created a program on the Teos2 disk called TEOS2STD.  The only variable in the recipe is deposition time.



maurice at

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

More information about the teos2 mailing list