From pnataraj at snf.stanford.edu Tue Nov 1 11:58:05 2005 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Tue, 1 Nov 2005 11:58:05 -0800 Subject: Shutdown thermco1 SNF 2005-11-01 11:58:04: WetOx failed Message-ID: I tryed to run 1000 C Wet Ox for 5 hrs last night, which gets me around 10,000A. But I got 1230A on my wafers. I am guessing the tourch for wet ox did not go on. From tberg at snf.stanford.edu Tue Nov 1 15:06:32 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 1 Nov 2005 15:06:32 -0800 Subject: Shutdown thermco1 SNF 2005-11-01 11:58:04: WetOx failed Message-ID: Reinstalled Gas line to torch-ran wetox OK From nvgirish at snf.stanford.edu Wed Nov 9 03:46:30 2005 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Wed, 9 Nov 2005 03:46:30 -0800 Subject: Problem thermco1 SNF 2005-11-09 03:46:29: Setpoint unattainable Message-ID: Hi The set point for zone1 could not be reached for wetox process (for temperatures 950 and 1000C). Run aborted. Girish From maurice at snf.stanford.edu Thu Nov 17 10:32:47 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 17 Nov 2005 10:32:47 -0800 Subject: Shutdown thermco1 SNF 2005-11-17 10:32:46: broken door plate Message-ID: From mdickey at snf.stanford.edu Thu Nov 17 14:06:45 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 17 Nov 2005 14:06:45 -0800 Subject: Shutdown thermco1 SNF 2005-11-17 10:32:46: broken door plate Message-ID: Replaced door plate...when temp is stabilized..ready for use From maurice at snf.stanford.edu Thu Nov 17 17:00:37 2005 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 17 Nov 2005 17:00:37 -0800 Subject: Problem thermco1 SNF 2005-11-09 03:46:29: Setpoint unattainable Message-ID: replaced door plate