From nvgirish at snf.stanford.edu  Fri Oct 28 10:27:58 2005
From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu)
Date: Fri, 28 Oct 2005 10:27:58 -0700
Subject: Problem thermco1 SNF 2005-10-28 10:27:57: Wafer cracked in tube
Message-ID: <mailman.18.1356283514.4788.thermco1-pcs@snf.stanford.edu>

HI
   One of my wafers were cracked in the tube after processing. Can you clean the tube because I think there might be some small pieces of the wafer in the tube.
Sorry for the inconvenience
Girish



From mdickey at snf.stanford.edu  Fri Oct 28 11:08:42 2005
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 28 Oct 2005 11:08:42 -0700
Subject: Shutdown thermco1 SNF 2005-10-28 11:08:42: Quartz
Message-ID: <mailman.19.1356283514.4788.thermco1-pcs@snf.stanford.edu>

Down for quartz particle removal



From mdickey at snf.stanford.edu  Fri Oct 28 13:50:45 2005
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 28 Oct 2005 13:50:45 -0700
Subject: Shutdown thermco1 SNF 2005-10-28 11:08:42: Quartz
Message-ID: <mailman.20.1356283514.4788.thermco1-pcs@snf.stanford.edu>

Vacuumed up broken quartz. Ready for use when temp
reached 800



From mdickey at snf.stanford.edu  Fri Oct 28 13:50:58 2005
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 28 Oct 2005 13:50:58 -0700
Subject: Problem thermco1 SNF 2005-10-28 10:27:57: Wafer cracked in tube
Message-ID: <mailman.21.1356283514.4788.thermco1-pcs@snf.stanford.edu>

Vacuumed up particles