Problem thermco1 SNF 2005-10-28 10:27:57: Wafer cracked in tube

nvgirish at nvgirish at
Fri Oct 28 10:27:58 PDT 2005

   One of my wafers were cracked in the tube after processing. Can you clean the tube because I think there might be some small pieces of the wafer in the tube.
Sorry for the inconvenience

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