From maurice at snf.stanford.edu Wed Aug 1 11:15:42 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 1 Aug 2007 11:15:42 -0700 Subject: Comment thermco1 SNF 2007-08-01 11:15:41: TLC clean Message-ID: 01:00:00 1TLCCLEA From maurice at snf.stanford.edu Wed Aug 1 14:32:26 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 1 Aug 2007 14:32:26 -0700 Subject: Comment thermco1 SNF 2007-06-04 11:08:50: Mislam wetox normal Message-ID: logged From gth at snf.stanford.edu Sat Aug 18 23:29:40 2007 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sat, 18 Aug 2007 23:29:40 -0700 Subject: Problem thermco1 SNF 2007-08-18 23:29:40: wetox is not working Message-ID: wanted 0.5u wet ox, used 1050 C, 1 hour (using Eric's Calc). got ~ 0.1u i think this is just dry ox, also remembered faintly that H2 was not reading anything during the process. From mdickey at snf.stanford.edu Mon Aug 20 06:53:30 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 20 Aug 2007 06:53:30 -0700 Subject: Comment thermco1 SNF 2007-08-20 06:53:29: Hydrogen Message-ID: Had to reset the Hydrogen. This may or may not have been the problem. From maurice at snf.stanford.edu Tue Aug 21 14:53:56 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 21 Aug 2007 14:53:56 -0700 Subject: Problem thermco1 SNF 2007-08-21 14:53:53: non uniformity wafer to wafewr Message-ID: 1wetox 1000c 01:00:00 center point readings of three consec wafers 1 3602 ang 2 2723 3 3824 From mtang at snf.stanford.edu Wed Aug 22 09:17:45 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 22 Aug 2007 09:17:45 -0700 Subject: Comment thermco1 SNF 2007-08-22 09:17:44: Correction to Problem 8/21/07 commnet Message-ID: 1wetox 1000c 01:00:00 center point readings of three consec wafers 1 3602 ang 2 3723 3 3824 From king at snf.stanford.edu Fri Aug 24 15:06:57 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 24 Aug 2007 15:06:57 -0700 Subject: Problem thermco1 SNF 2007-08-24 15:06:57: Wand tip is loose! Message-ID: Help, it's Friday and there isn't a backup wand. From nevran at snf.stanford.edu Sat Aug 25 02:06:57 2007 From: nevran at snf.stanford.edu (nevran at snf.stanford.edu) Date: Sat, 25 Aug 2007 02:06:57 -0700 Subject: Problem thermco1 SNF 2007-08-25 02:06:57: Oxide thickness Message-ID: Ran 900wetox for 90min, which should have given ~2000A. Wafers came out with spots and thickness of ~4500A. From nevran at snf.stanford.edu Sat Aug 25 02:10:37 2007 From: nevran at snf.stanford.edu (nevran at snf.stanford.edu) Date: Sat, 25 Aug 2007 02:10:37 -0700 Subject: Problem thermco1 SNF 2007-08-25 02:10:37: thick wet ox Message-ID: Ran 900wetox for 90 min, which should have given ~2000A oxide. Wafers came out with spots and thickness of ~4500A! From tberg at snf.stanford.edu Mon Aug 27 06:38:53 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 27 Aug 2007 06:38:53 -0700 Subject: Problem thermco1 SNF 2007-08-18 23:29:40: wetox is not working Message-ID: h2 reset From tberg at snf.stanford.edu Mon Aug 27 06:39:20 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 27 Aug 2007 06:39:20 -0700 Subject: Comment thermco1 SNF 2007-08-20 06:53:29: Hydrogen Message-ID: reset H2 From tberg at snf.stanford.edu Mon Aug 27 06:39:51 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 27 Aug 2007 06:39:51 -0700 Subject: Problem thermco1 SNF 2007-08-24 15:06:57: Wand tip is loose! Message-ID: replaced From maurice at snf.stanford.edu Wed Aug 29 15:04:21 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 29 Aug 2007 15:04:21 -0700 Subject: Problem thermco1 SNF 2007-08-25 02:10:37: thick wet ox Message-ID: ran 1wetox at 1000c for 00:08:00, expected 1000 an ctblr #1 969 979 953 966 964 #2 1024 1031 997 1014 1017 #3 1021 1033 1005 1019 #4 1030 1038 1017 1017 1031 #5 1031 1037 1020 1028 1028 There are no white spots on this test. From maurice at snf.stanford.edu Wed Aug 29 15:04:36 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 29 Aug 2007 15:04:36 -0700 Subject: Problem thermco1 SNF 2007-08-25 02:06:57: Oxide thickness Message-ID: ran 1wetox at 1000c for 00:08:00, expected 1000 an ctblr #1 969 979 953 966 964 #2 1024 1031 997 1014 1017 #3 1021 1033 1005 1019 #4 1030 1038 1017 1017 1031 #5 1031 1037 1020 1028 1028 There are no white spots on this test. From maurice at snf.stanford.edu Wed Aug 29 15:05:06 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 29 Aug 2007 15:05:06 -0700 Subject: Comment thermco1 SNF 2007-08-22 09:17:44: Correction to Problem 8/21/07 commnet Message-ID: logged From maurice at snf.stanford.edu Wed Aug 29 15:05:27 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 29 Aug 2007 15:05:27 -0700 Subject: Problem thermco1 SNF 2007-08-21 14:53:53: non uniformity wafer to wafewr Message-ID: ran 1wetox at 1000c for 00:08:00, expected 1000 an ctblr #1 969 979 953 966 964 #2 1024 1031 997 1014 1017 #3 1021 1033 1005 1019 #4 1030 1038 1017 1017 1031 #5 1031 1037 1020 1028 1028 There are no white spots on this test. From rik at snf.stanford.edu Fri Aug 31 16:46:01 2007 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Fri, 31 Aug 2007 16:46:01 -0700 Subject: Comment thermco1 SNF 2007-08-31 16:46:00: Temp stabilization Message-ID: Trying to run a 1150C anneal recipe. The temperature has not ramped up / stabilized after 3 hours. Not sure if this is usual behavior.