From tberg at snf.stanford.edu  Thu Jan  4 06:33:05 2007
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 4 Jan 2007 06:33:05 -0800
Subject: Shutdown thermco1 SNF 2007-01-04 06:33:05: burn box issues
Message-ID: <mailman.46.1356283514.4788.thermco1-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Thu Jan  4 06:34:44 2007
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 4 Jan 2007 06:34:44 -0800
Subject: Shutdown thermco1 SNF 2007-01-04 06:33:05: burn box issues
Message-ID: <mailman.47.1356283514.4788.thermco1-pcs@snf.stanford.edu>

wrong tube



From gyama at snf.stanford.edu  Thu Jan  4 09:56:27 2007
From: gyama at snf.stanford.edu (gyama at snf.stanford.edu)
Date: Thu, 4 Jan 2007 09:56:27 -0800
Subject: Problem thermco1 SNF 2007-01-04 09:56:27: did 1wetox 16hrs @1000C & got 3050A
Message-ID: <mailman.48.1356283514.4788.thermco1-pcs@snf.stanford.edu>

which works out to dryox thickness.  Pls ck H2



From gyama at snf.stanford.edu  Fri Jan  5 08:49:31 2007
From: gyama at snf.stanford.edu (gyama at snf.stanford.edu)
Date: Fri, 5 Jan 2007 08:49:31 -0800
Subject: Comment thermco1 SNF 2007-01-05 08:49:29: H2 was off, working fine now
Message-ID: <mailman.49.1356283514.4788.thermco1-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Wed Jan 10 06:46:40 2007
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 10 Jan 2007 06:46:40 -0800
Subject: Problem thermco1 SNF 2007-01-04 09:56:27: did 1wetox 16hrs @1000C & got 3050A
Message-ID: <mailman.50.1356283514.4788.thermco1-pcs@snf.stanford.edu>

Reset H2. its fine now



From kuanlinc at snf.stanford.edu  Wed Jan 10 11:15:25 2007
From: kuanlinc at snf.stanford.edu (kuanlinc at snf.stanford.edu)
Date: Wed, 10 Jan 2007 11:15:25 -0800
Subject: Shutdown thermco1 SNF 2007-01-10 11:15:25: Contaminated
Message-ID: <mailman.51.1356283514.4788.thermco1-pcs@snf.stanford.edu>

The gown touch the metal bar while pulling the wafers off.
The gown got melted and sticked on the bar.



From mdickey at snf.stanford.edu  Wed Jan 10 13:05:52 2007
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Wed, 10 Jan 2007 13:05:52 -0800
Subject: Shutdown thermco1 SNF 2007-01-10 11:15:25: Contaminated
Message-ID: <mailman.52.1356283514.4788.thermco1-pcs@snf.stanford.edu>

Scraped off smock residue



From maurice at snf.stanford.edu  Fri Jan 26 16:39:21 2007
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Fri, 26 Jan 2007 16:39:21 -0800
Subject: Shutdown thermco1 SNF 2007-01-26 16:39:21: user logged off computer
Message-ID: <mailman.53.1356283514.4788.thermco1-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Mon Jan 29 14:44:25 2007
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Mon, 29 Jan 2007 14:44:25 -0800
Subject: Shutdown thermco1 SNF 2007-01-26 16:39:21: user logged off computer
Message-ID: <mailman.54.1356283514.4788.thermco1-pcs@snf.stanford.edu>

someone restarted it!?!?!



From riteshj at snf.stanford.edu  Wed Jan 31 16:10:28 2007
From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu)
Date: Wed, 31 Jan 2007 16:10:28 -0800
Subject: Problem thermco1 SNF 2007-01-31 16:10:28: vacuum wand 
Message-ID: <mailman.55.1356283514.4788.thermco1-pcs@snf.stanford.edu>

loses vacuum when stretched all the way to load wafers on thermco 1 and thermco 2 tubes. extension ?