From maurice at snf.stanford.edu Tue Jan 6 17:50:11 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 6 Jan 2009 17:50:11 -0800 Subject: Comment thermco1 SNF 2009-01-06 17:50:11: modified drystep1 subroutine Message-ID: Added step at end of subroutine DRYSTEP1 to set Hi O2 flow to zero (it was set to 7 SLM) From maurice at snf.stanford.edu Wed Jan 7 15:29:23 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 7 Jan 2009 15:29:23 -0800 Subject: Comment thermco1 SNF 2009-01-07 15:29:23: created 1DOXAN Message-ID: 1DOXAN dryox with variable temp and time followed by N2 anneal variable temp and time From tberg at snf.stanford.edu Tue Jan 13 06:34:16 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 13 Jan 2009 06:34:16 -0800 Subject: Problem thermco1 SNF 2008-12-08 20:12:35: Alarm Message-ID: This is normal since temp is not stabilized afer pull