From tberg at snf.stanford.edu  Mon Aug 16 12:14:13 2010
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 16 Aug 2010 12:14:13 -0700
Subject: Comment thermco1 SNF 2010-08-16 12:14:13: did boaT AND TEMP CALS
Message-ID: <mailman.165.1356283515.4788.thermco1-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Tue Aug 24 10:24:00 2010
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 24 Aug 2010 10:24:00 -0700
Subject: Problem thermco1 SNF 2010-08-24 10:23:59: thinner oxide dep
Message-ID: <mailman.166.1356283515.4788.thermco1-pcs@snf.stanford.edu>

user aresh reports:
I ran 9 wafers in tube 1 WET1000 35min, I had run this recipe 8 times in nthe past year and the thickness is always 3000A, when I ran the same recipie today I got 2000A, has anyone changed any parameter in the recepie or ran any unsual recipe on thermco 1 recently?



From cursive at snf.stanford.edu  Tue Aug 24 10:36:58 2010
From: cursive at snf.stanford.edu (cursive at snf.stanford.edu)
Date: Tue, 24 Aug 2010 10:36:58 -0700
Subject: Comment thermco1 SNF 2010-08-24 10:36:57: ran 1050'C wet oxideation 10min, the result is ok
Message-ID: <mailman.167.1356283515.4788.thermco1-pcs@snf.stanford.edu>

I ran the 1050'C wet oxidation 10 min on Aug. 15.
The result is close to the oxide thickness calculater.
The result from the calculator is 1606, and my result is 1680A.