Problem thermco1 SNF 2010-08-24 10:23:59: thinner oxide dep

maurice at maurice at
Tue Aug 24 10:24:00 PDT 2010

user aresh reports:
I ran 9 wafers in tube 1 WET1000 35min, I had run this recipe 8 times in nthe past year and the thickness is always 3000A, when I ran the same recipie today I got 2000A, has anyone changed any parameter in the recepie or ran any unsual recipe on thermco 1 recently?

More information about the thermco1-pcs mailing list