Problem thermco1 SNF 2010-08-24 10:23:59: thinner oxide dep

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Aug 24 10:24:00 PDT 2010


user aresh reports:
I ran 9 wafers in tube 1 WET1000 35min, I had run this recipe 8 times in nthe past year and the thickness is always 3000A, when I ran the same recipie today I got 2000A, has anyone changed any parameter in the recepie or ran any unsual recipe on thermco 1 recently?




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