From maurice at snf.stanford.edu Mon Jan 4 15:05:53 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Jan 2010 15:05:53 -0800 Subject: Comment thermco1 SNF 2010-01-04 15:05:53: Ran 1TLCCLEAN Message-ID: From mmessana at snf.stanford.edu Tue Jan 5 11:10:48 2010 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Tue, 5 Jan 2010 11:10:48 -0800 Subject: Shutdown thermco1 SNF 2010-01-05 11:10:48: badlamp error Message-ID: tube was up to temperature and stabilizing (only 850C) and looks like it showed "badlamp" error around the time it started the actual process. wafers still need the loaded recipe run on them and are still in the furnace. From grahamab at snf.stanford.edu Tue Jan 5 18:19:25 2010 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Tue, 5 Jan 2010 18:19:25 -0800 Subject: Problem thermco1 SNF 2010-01-05 18:19:25: badlamp error again Message-ID: not sure if it was reported, but apparently it gave the same error again this afternoon despite being "fixed" after the first one. From maurice at snf.stanford.edu Wed Jan 6 09:28:36 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Jan 2010 09:28:36 -0800 Subject: Shutdown thermco1 SNF 2010-01-05 11:10:48: badlamp error Message-ID: Tube has a lamp issue but can be used for dry oxide and anneals. From maurice at snf.stanford.edu Wed Jan 6 09:36:48 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Jan 2010 09:36:48 -0800 Subject: Problem thermco1 SNF 2010-01-06 09:36:48: NO WET OXIDE Message-ID: Tube has a lamp issue but can be used for dry oxide and anneals. NO WET OXIDE GROWTH until lamp issue is fixed. From maurice at snf.stanford.edu Wed Jan 6 09:36:59 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Jan 2010 09:36:59 -0800 Subject: Problem thermco1 SNF 2010-01-05 18:19:25: badlamp error again Message-ID: Tube has a lamp issue but can be used for dry oxide and anneals. From tberg at snf.stanford.edu Wed Jan 6 10:16:30 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Jan 2010 10:16:30 -0800 Subject: Problem thermco1 SNF 2010-01-06 09:36:48: NO WET OXIDE Message-ID: Replaced lamps on torch module. ran 1wet ox no problem From maurice at snf.stanford.edu Mon Jan 11 14:46:51 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Jan 2010 14:46:51 -0800 Subject: Comment thermco1 SNF 2010-01-11 14:46:51: test Message-ID: ran 1wetox 00:39:00 900c expected 1000A 1122,1031,945,953,955,946,938,950,969 1036,1035,1035,1033,1008,1020,1031,1034,1004 1021,1019,977,964,963,959,966,981,968 980,971,966,962,960,960,967,962,959 From maurice at snf.stanford.edu Tue Jan 19 09:53:19 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Jan 2010 09:53:19 -0800 Subject: Shutdown thermco1 SNF 2010-01-19 09:53:18: heating up after power outage Message-ID: From maurice at snf.stanford.edu Tue Jan 19 15:11:35 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Jan 2010 15:11:35 -0800 Subject: Shutdown thermco1 SNF 2010-01-19 09:53:18: heating up after power outage Message-ID: up to temp