From maurice at snf.stanford.edu  Wed Sep  1 11:20:01 2010
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 1 Sep 2010 11:20:01 -0700
Subject: Problem thermco1 SNF 2010-08-24 10:23:59: thinner oxide dep
Message-ID: <mailman.168.1356283515.4788.thermco1-pcs@snf.stanford.edu>

both cusive and ahazeghi (he wrot\e up the the thin oxide problem) have run several wet oxide runs and the growth rate matched the calculator



From maurice at snf.stanford.edu  Wed Sep  1 11:20:26 2010
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 1 Sep 2010 11:20:26 -0700
Subject: Comment thermco1 SNF 2010-08-24 10:36:57: ran 1050'C wet oxideation 10min, the result is ok
Message-ID: <mailman.169.1356283515.4788.thermco1-pcs@snf.stanford.edu>

logged...thank you for the info!



From zpatel at snf.stanford.edu  Thu Sep  9 14:10:44 2010
From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu)
Date: Thu, 9 Sep 2010 14:10:44 -0700
Subject: Comment thermco1 SNF 2010-09-09 14:10:44: New 6" boat required 
Message-ID: <mailman.170.1356283515.4788.thermco1-pcs@snf.stanford.edu>

There is one 6" wafer boat in thermco1 without braces
This is similiar to the 6" wafer boat in thermco 2 (no brace on the top to minimize thermal expansion.)
this causes serious problem  and chipping as the wafer a held ver loosely just at the bottom slots.



From seymour at snf.stanford.edu  Thu Sep  9 14:47:19 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Thu, 9 Sep 2010 14:47:19 -0700
Subject: Comment thermco1 SNF 2010-09-09 14:47:19: new 4 in boat and cleaned 6 in boat on thermco2 lo9ad station
Message-ID: <mailman.171.1356283515.4788.thermco1-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Mon Sep 13 11:35:48 2010
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Mon, 13 Sep 2010 11:35:48 -0700
Subject: Comment thermco1 SNF 2010-09-13 11:35:47: Sept Qual Thermco1
Message-ID: <mailman.172.1356283515.4788.thermco1-pcs@snf.stanford.edu>

9/8/2010
-Wet 900   00:39:00
-
-50 wafer spread (wafer 1 and 25 in front boat, wafer 1 and 25 in second boat)
--Target 1000ang
-
-front boat wafer 1	
-Average:	908.11 Ang
-Std Dev:	4.6135
-
-front boat wafer 25
-Average:	957
Std Dev:	3.3673
-
-back boat wafer 1	
-Average:	959.39
-Std Dev:	5.2608
-
-back boat wafer 25	
-Average:	969.79
-Std Dev:	3.8144
Boats are in the center of the tube.