Comment thermco1 SNF 2010-09-09 14:10:44: New 6" boat required

zpatel at snf.stanford.edu zpatel at snf.stanford.edu
Thu Sep 9 14:10:44 PDT 2010


There is one 6" wafer boat in thermco1 without braces
This is similiar to the 6" wafer boat in thermco 2 (no brace on the top to minimize thermal expansion.)
this causes serious problem  and chipping as the wafer a held ver loosely just at the bottom slots.




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