From maurice at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Shutdown thermco1 SNF 2012-08-17 16:33:11: element braker off Message-ID: <20229942.170.1345246391793.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Shutdown thermco1 SNF 2012-08-17 16:33:11: element braker off Message-ID: <22649102.6.1345474154313.JavaMail.coral@shine> breaker back on heating up From maurice at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Problem thermco1 SNF 2012-07-09 15:53:34: Qual test thin Message-ID: <6807863.62.1345676050105.JavaMail.coral@shine> Aug Qual closer to normal wet900 00:39:00 EXPECT`1000A WAFER1 ave 909A WAFER2 ave 945 WAFER3 ave 961 From maurice at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Comment thermco1 SNF 2012-08-22 16:00:20: Aug Qual Message-ID: <4666352.63.1345676421241.JavaMail.coral@shine> Aug Qual wet900 00:39:00 EXPECT`1000A (BYU calc 921 A) WAFER1 ave 909A WAFER2 ave 945 WAFER3 ave 961 From maurice at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Problem thermco1 SNF 2012-07-20 13:06:11: Layer too thin Message-ID: <30792400.157.1345841471282.JavaMail.coral@shine> pcristman reports that his 1um wet oxide came out 1.1um...looks good Monthly qual at 1000A was also good From maurice at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Problem thermco1 SNF 2012-07-19 15:20:36: wet960 test Message-ID: <24425109.158.1345841482339.JavaMail.coral@shine> pcristman reports that his 1um wet oxide came out 1.1um...looks good Monthly qual at 1000A was also good From maurice at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Problem thermco1 SNF 2012-07-16 17:15:00: Layer too thin than expected Message-ID: <25930058.159.1345841488348.JavaMail.coral@shine> pcristman reports that his 1um wet oxide came out 1.1um...looks good Monthly qual at 1000A was also good From maurice at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Comment thermco1 SNF 2012-04-10 16:33:41: Deposition rate is close to normal now Message-ID: <27339892.160.1345841504405.JavaMail.coral@shine> logged From maurice at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Comment thermco1 SNF 2012-06-19 09:16:50: Thermco1 dry oxide test good Message-ID: <6364361.161.1345841517474.JavaMail.coral@shine> logged From tberg at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Comment thermco1 SNF 2012-09-21 07:13:23: badger interlock installed and tested today Message-ID: <15830327.1.1348236804198.JavaMail.coral@shine> badger interlock installed and tested today, thanks, John S and Ray From maurice at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Comment thermco1 SNF 2012-09-28 14:40:07: Thermco1Sept Qual complete Message-ID: <2905090.100.1348868408689.JavaMail.coral@shine> Thermco1Sept Qual complete 1WETOX 900c 00:39:00 50 wafer spread wafer1 (front of first boat) 945, 941, 938, 938, 930, 932, 948, 942, 947 wafer2 (end of first boat) 943, 924, 906, 887, 885, 888, 891, 911, 912 wafer3 (end of second boat) 940, 934, 930, 924, 921, 925, 925, 933, 932 From xzhuan1 at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Problem thermco1 SNF 2012-11-10 23:00:38: low deposition rate Message-ID: <26649367.49.1352617238302.JavaMail.coral@shine> wet 1050C, 1hr 40mins, target thickness 7000A, measured thickness only 3000A From tberg at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Comment thermco1 SNF 2012-11-12 13:23:52: RAN 1WETOX Message-ID: <26950939.14.1352755433115.JavaMail.coral@shine> Ran 1wetox temps, flows were fine. Operation seemed normal no issues found . Will keep open for observation. From lofaolain at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: lofaolain at snf.stanford.edu (lofaolain at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Problem thermco1 SNF 2012-11-16 11:35:38: Low oxidation rate Message-ID: <9044862.121.1353094539457.JavaMail.coral@shine> Ran wetox at 1100C for 39mins. This gave 4950A oxide which is about right. I then oxidised half the first batch for 7hrs44mins at wetox at 1000C. This should have given a final thicknness of ~1.5 um but there was only 6210A. From maurice at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Comment thermco1 SNF 2012-11-28 10:24:14: Novermber qual Message-ID: <30783813.2.1354127055418.JavaMail.coral@shine> wafer1 974.68 963.78 956.67 948.35 948.52 958.61 959.52 950.97 947.76 wafer2 983.66 975.65 972.22 968.67 965.61 964.15 968.03 974.2 978.45 wafer3 1001.9 983.77 976.82 976.68 974.5 976.87 976.66 977.39 978.7 From paulyoon at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: paulyoon at snf.stanford.edu (paulyoon at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Comment thermco1 SNF 2012-12-04 17:02:13: Low oxidation rate Message-ID: <10570644.26.1354669333659.JavaMail.coral@shine> 950C, 1:30:00. I expected 350nm, but I got 130nm From maurice at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Comment thermco1 SNF 2012-12-05 10:53:06: running wetox test Message-ID: <12341829.27.1354733586557.JavaMail.coral@shine> From maurice at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Comment thermco1 SNF 2012-12-05 10:53:06: running wetox test Message-ID: <20251621.36.1354747002857.JavaMail.coral@shine> ran 1wetox 00:39:00 900c expected ~1000ang wafer1 ave 750 wafer2 ave 764 wafer3 ave 774 From maurice at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Problem thermco1 SNF 2012-12-05 14:37:23: low wet oxide rate Message-ID: <7856411.37.1354747044257.JavaMail.coral@shine> ran 1wetox 00:39:00 900c expected ~1000ang wafer1 ave 750 wafer2 ave 764 wafer3 ave 774 we will run a dry test tomorrow From maurice at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Comment thermco1 SNF 2012-12-10 11:39:54: running dry test Message-ID: <21350241.0.1355168395451.JavaMail.coral@shine> 1dryox 950c 01:00:00 From maurice at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Comment thermco1 SNF 2012-12-10 11:39:54: running dry test Message-ID: <19391214.0.1355247993119.JavaMail.coral@shine> 1dryox 950c 01:00:00 expected 325 ang (BYU calc) wafer1 ave 337ang wafer2 (slot 25) 338 ang wafer3 (slot50) 335 ang Dry test looks ver good and uniform. From maurice at snf.stanford.edu Sun Dec 23 09:25:14 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:25:14 -0000 Subject: Comment thermco1 SNF 2012-12-11 09:46:47: dry test good Message-ID: <25228613.1.1355248008306.JavaMail.coral@shine> 1dryox 950c 01:00:00 expected 325 ang (BYU calc) wafer1 ave 337ang wafer2 (slot 25) 338 ang wafer3 (slot50) 335 ang Dry test looks ver good and uniform.