Comment thermco1 SNF 2012-02-14 11:33:51: Feb Qual

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Feb 14 11:33:51 PST 2012


1wetox   
900c  
00:39:00   
Target 1000ang   
limits 900-1100ang
Wafer1
t	1:(0.00,4.00)	978.01
tc	2:(0.00,2.00)	974.71
c	3:(0.00,0.00)	990.7
bc	4:(0.00,-2.00)	977.05
bc	5:(0.00,-4.00)	986.78
l	6:(-4.00,0.00)	987.48
lc	7:(-2.00,0.00)	989.27
rc	8:(2.00,0.00)	987.23
rc	9:(4.00,0.00)	978.96
-
wafer25
1:(0.00,4.00)	1009.7
2:(0.00,2.00)	1016.9
3:(0.00,0.00)	1020
4:(0.00,-2.00)	1019.1
5:(0.00,-4.00)	1018.8
6:(-4.00,0.00)	1009.2
7:(-2.00,0.00)	1018.3
8:(2.00,0.00)	1017.3
9:(4.00,0.00)	1013.3
-
wafer 50
1:(0.00,4.00)	1017.8
2:(0.00,2.00)	1011.3
3:(0.00,0.00)	1015.4
4:(0.00,-2.00)	1013.6
5:(0.00,-4.00)	1014.2
6:(-4.00,0.00)	1006.2
7:(-2.00,0.00)	1013.3
8:(2.00,0.00)	1013.3
9:(4.00,0.00)	1006.9




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