From maurice at snf.stanford.edu  Mon Jul  9 15:53:34 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Mon, 9 Jul 2012 15:53:34 -0700
Subject: Problem thermco1 SNF 2012-07-09 15:53:34: Qual test thin
Message-ID: <mailman.249.1356283516.4788.thermco1-pcs@snf.stanford.edu>

Ran 1wetox  900c 00:39:00
Expected ~1000ang
wafer1   714
wafer2   741
wafer3   745



From maurice at snf.stanford.edu  Mon Jul  9 15:53:53 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Mon, 9 Jul 2012 15:53:53 -0700
Subject: Problem thermco1 SNF 2012-06-20 13:15:38: Wetox test thin
Message-ID: <mailman.250.1356283516.4788.thermco1-pcs@snf.stanford.edu>

see 7/9 qual



From maurice at snf.stanford.edu  Mon Jul  9 15:54:08 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Mon, 9 Jul 2012 15:54:08 -0700
Subject: Problem thermco1 SNF 2012-06-14 08:47:23: low oxidation rate
Message-ID: <mailman.251.1356283516.4788.thermco1-pcs@snf.stanford.edu>

see 7/9 qual



From maurice at snf.stanford.edu  Fri Jul 13 08:05:38 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Fri, 13 Jul 2012 08:05:38 -0700
Subject: Comment thermco1 SNF 2012-07-13 08:05:37: running wetox test
Message-ID: <mailman.252.1356283516.4788.thermco1-pcs@snf.stanford.edu>

Createde 1WETOXX that has new subroutine TORCHONX.  This subroutine has the MFPTABLE removed



From maurice at snf.stanford.edu  Fri Jul 13 14:12:55 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Fri, 13 Jul 2012 14:12:55 -0700
Subject: Comment thermco1 SNF 2012-07-13 08:05:37: running wetox test
Message-ID: <mailman.253.1356283516.4788.thermco1-pcs@snf.stanford.edu>

Createde 1WETOXX that has new subroutine TORCHONX.  This subroutine has the MFPTABLE removed
Ran 1wetoxx  00:39:00    900C
expected ~100o ang
WAFER1      935 ang
WAFER 25   945
WAFER50    955



From ytcheng at snf.stanford.edu  Mon Jul 16 17:15:00 2012
From: ytcheng at snf.stanford.edu (ytcheng at snf.stanford.edu)
Date: Mon, 16 Jul 2012 17:15:00 -0700
Subject: Problem thermco1 SNF 2012-07-16 17:15:00: Layer too thin than expected
Message-ID: <mailman.254.1356283516.4788.thermco1-pcs@snf.stanford.edu>

I ran wetox with 960C for 21 hours.  The expected ox thickness is 2um but the actual thickness is 10300 A on ave.



From tberg at snf.stanford.edu  Tue Jul 17 10:32:21 2012
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 17 Jul 2012 10:32:21 -0700
Subject: Comment thermco1 SNF 2012-04-10 10:31:57: Reset H2 switch in source cabinet
Message-ID: <mailman.255.1356283516.4788.thermco1-pcs@snf.stanford.edu>

noted



From maurice at snf.stanford.edu  Thu Jul 19 15:20:37 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Thu, 19 Jul 2012 15:20:37 -0700
Subject: Problem thermco1 SNF 2012-07-19 15:20:36: wet960 test
Message-ID: <mailman.256.1356283516.4788.thermco1-pcs@snf.stanford.edu>

Ran 2WETOX   960c   01:00:00
expected~ 2787Ang from BYU calc
Actual = 2181 ang



From lofaolain at snf.stanford.edu  Fri Jul 20 13:06:11 2012
From: lofaolain at snf.stanford.edu (lofaolain at snf.stanford.edu)
Date: Fri, 20 Jul 2012 13:06:11 -0700
Subject: Problem thermco1 SNF 2012-07-20 13:06:11: Layer too thin
Message-ID: <mailman.257.1356283516.4788.thermco1-pcs@snf.stanford.edu>

Ran 1WETOX   1000c   14:30:00
expected~ 19000Ang from BYU calc
Actual = 3820 ang!