From eldwin at snf.stanford.edu  Thu Jun 14 08:47:24 2012
From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu)
Date: Thu, 14 Jun 2012 08:47:24 -0700
Subject: Problem thermco1 SNF 2012-06-14 08:47:23: low oxidation rate
Message-ID: <mailman.246.1356283516.4788.thermco1-pcs@snf.stanford.edu>

1WETOX @ 1000C for 52 min. Expected ~300nm, result: 190nm



From maurice at snf.stanford.edu  Tue Jun 19 09:16:51 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 19 Jun 2012 09:16:51 -0700
Subject: Comment thermco1 SNF 2012-06-19 09:16:50: Thermco1 dry oxide test good
Message-ID: <mailman.247.1356283516.4788.thermco1-pcs@snf.stanford.edu>

Ran 1dryox     01:10:00   900c
exected ~960
Actually 982
Now running wet test



From maurice at snf.stanford.edu  Wed Jun 20 13:15:39 2012
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 20 Jun 2012 13:15:39 -0700
Subject: Problem thermco1 SNF 2012-06-20 13:15:38: Wetox test thin
Message-ID: <mailman.248.1356283516.4788.thermco1-pcs@snf.stanford.edu>

Wet 900  39 min
expected~1000A
Boat1 wafer1
910.93
890.06
890.36
878.89
885.12
889.23
886.34
881.48
885.31
-
Boat 1 wafer25
1029.9
974.25
937.73
924.56
924.03
920.86
929.66
937.39
926.86
-
boat2 wafer 25
931.1
929.5
931.55
933.29
937.57
937.16
933.6
931.21
933.09