PROBLEM WITH THERMCO 1

Arash Hazeghi ahazeghi at stanford.edu
Tue Aug 24 01:13:08 PDT 2010


I should mention that uniformity was also horrible @ 2%, tyoically it is 0.1%...please advise what has happened to the furnace. 





From: "Arash Hazeghi" <ahazeghi at stanford.edu> 
To: thermco1 at snf.stanford.edu 
Cc: "maurice stevens" <maurice at stanford.edu> 
Sent: Tuesday, August 24, 2010 1:05:22 AM 
Subject: PROBLEM WITH THERMCO 1 


Dear Thermco useres, 
I ran 9 wafers in tube 1 WET1000 35min, I had run this recipe 8 times in nthe past year and the thickness is always 3000A, when I ran the same recipie today I got 2000A, has anyone changed any parameter in the recepie or ran any unsual recipe on thermco 1 recently? 

Thanks, 
Arash 



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