From shwong at snf.stanford.edu Fri Jun 1 14:26:47 2007 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Fri, 1 Jun 2007 14:26:47 -0700 Subject: Problem thermco2 SNF 2007-06-01 14:26:47: strange oxidation Message-ID: I oxidized at 1100 for 40 min wetox, which should give me 5100 angstroms of oxide, but i measured 1350 angstroms. something is weird From jprovine at snf.stanford.edu Fri Jun 1 22:46:59 2007 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 1 Jun 2007 22:46:59 -0700 Subject: Comment thermco2 SNF 2007-06-01 22:46:58: oxidation results Message-ID: after shwong i ran for 1 hour at 1100C in 2wetox and got 650nm which is right at the predicted deal grove value. unsure what the hit or miss problems with the tube may be, but at least most of the time it is growing good films. From maurice at snf.stanford.edu Mon Jun 4 11:11:26 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Jun 2007 11:11:26 -0700 Subject: Comment thermco2 SNF 2007-06-04 11:11:25: mislam: normal wetox Message-ID: mislam ran Thermco2 and got normal wetox growth on 6/3/07 From maurice at snf.stanford.edu Mon Jun 4 11:12:29 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Jun 2007 11:12:29 -0700 Subject: Problem thermco2 SNF 2007-06-01 14:26:47: strange oxidation Message-ID: jprovine and mislam both report normal wetox From nevran at snf.stanford.edu Sat Jun 9 15:25:30 2007 From: nevran at snf.stanford.edu (nevran at snf.stanford.edu) Date: Sat, 9 Jun 2007 15:25:30 -0700 Subject: Problem thermco2 SNF 2007-06-09 15:25:30: Bad deposition Message-ID: Put in two wafers, both had a discolored region located on right side with flat up. Middle of the region has dark, dingy yellow color which fades into blue and then purple. From maurice at snf.stanford.edu Mon Jun 11 15:24:53 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Jun 2007 15:24:53 -0700 Subject: Comment thermco2 SNF 2007-06-04 11:11:25: mislam: normal wetox Message-ID: logged From maurice at snf.stanford.edu Mon Jun 11 15:25:01 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Jun 2007 15:25:01 -0700 Subject: Comment thermco2 SNF 2007-06-01 22:46:58: oxidation results Message-ID: logged From maurice at snf.stanford.edu Mon Jun 11 15:28:01 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Jun 2007 15:28:01 -0700 Subject: Comment thermco2 SNF 2007-06-11 15:28:00: wetox 900 looks ok on 4" Message-ID: Nevran's comment about bad deposition was on 6" wafers. Wetox 900 looks ok on 4". Boats and tube look normal. Don't know the cause of her bad deposition. From gth at snf.stanford.edu Sun Jun 17 17:48:02 2007 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sun, 17 Jun 2007 17:48:02 -0700 Subject: Problem thermco2 SNF 2007-06-17 17:48:01: software froze: wafers inside Message-ID: please help. -gaurav From tberg at snf.stanford.edu Tue Jun 19 06:43:44 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 19 Jun 2007 06:43:44 -0700 Subject: Problem thermco2 SNF 2007-06-17 17:48:01: software froze: wafers inside Message-ID: no problem found From rissman at snf.stanford.edu Thu Jun 21 09:14:59 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Thu, 21 Jun 2007 09:14:59 -0700 Subject: Problem thermco2 SNF 2007-06-09 15:25:30: Bad deposition Message-ID: Will revisit in the future, but since 4" oxidation is OK and there is no reason why 6" should be different, will clear this message. However, we will revisit 6" process in the future. From nppatil at snf.stanford.edu Sat Jun 23 13:38:16 2007 From: nppatil at snf.stanford.edu (nppatil at snf.stanford.edu) Date: Sat, 23 Jun 2007 13:38:16 -0700 Subject: Problem thermco2 SNF 2007-06-23 13:38:15: Thermco Computer Message-ID: Main Menu does not appear when Do key is pressed several times. From tberg at snf.stanford.edu Mon Jun 25 07:17:46 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Jun 2007 07:17:46 -0700 Subject: Problem thermco2 SNF 2007-06-23 13:38:15: Thermco Computer Message-ID: dokey worked just fine for me From tberg at snf.stanford.edu Mon Jun 25 07:17:58 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Jun 2007 07:17:58 -0700 Subject: Comment thermco2 SNF 2007-06-11 15:28:00: wetox 900 looks ok on 4" Message-ID: noted