Problem thermco2 SNF 2007-06-09 15:25:30: Bad deposition

nevran at snf.stanford.edu nevran at snf.stanford.edu
Sat Jun 9 15:25:30 PDT 2007


Put in two wafers, both had a discolored region located on right side with flat up. Middle of the region has dark, dingy yellow color which fades into blue and then purple.




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