Comment thermco2 SNF 2007-06-11 15:28:00: wetox 900 looks ok on 4"

maurice at snf.stanford.edu maurice at snf.stanford.edu
Mon Jun 11 15:28:01 PDT 2007


Nevran's comment about bad deposition was on 6" wafers.
Wetox 900 looks ok on 4". 
 Boats and tube look normal.  Don't know the cause of her bad deposition.




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