Problem thermco2 SNF 2007-06-09 15:25:30: Bad deposition

rissman at snf.stanford.edu rissman at snf.stanford.edu
Thu Jun 21 09:14:59 PDT 2007


Will revisit in the future, but since 4" oxidation is OK and there is no reason why 6" should be different, will clear this message.  However, we will revisit 6" process in the future.




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