From king at snf.stanford.edu Fri Mar 2 23:22:23 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 2 Mar 2007 23:22:23 -0800 Subject: Problem thermco2 SNF 2007-03-02 23:22:23: vacuum wand button Message-ID: The spring is missing so the wand doesn;t work. To use the wand, turn it on and use your finger to plug (vacuum) and unplug (no vacuum) the hole. The button is sitting on the furnaces. From tberg at snf.stanford.edu Mon Mar 5 07:55:12 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 5 Mar 2007 07:55:12 -0800 Subject: Problem thermco2 SNF 2007-03-02 23:22:23: vacuum wand button Message-ID: Replaced wand From gth at snf.stanford.edu Sun Mar 11 03:45:20 2007 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sun, 11 Mar 2007 03:45:20 -0700 Subject: Problem thermco2 SNF 2007-03-11 03:45:16: 2DRYOX gives error Message-ID: hi maurice recepie 2DRYOX gives a field error ! I can not process my wafers....i am dead :() i used the same recepie few minutes back to grow 60A oxide now it does not work for 1000A ? :() thanks -gaurav From tberg at snf.stanford.edu Tue Mar 13 08:07:00 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 13 Mar 2007 08:07:00 -0700 Subject: Problem thermco2 SNF 2007-03-11 03:45:16: 2DRYOX gives error Message-ID: Loaded recipe and started no problem. Not sure wher error occured. Others have run with no problem From haniff at snf.stanford.edu Sat Mar 24 06:07:08 2007 From: haniff at snf.stanford.edu (haniff at snf.stanford.edu) Date: Sat, 24 Mar 2007 06:07:08 -0700 Subject: Problem thermco2 SNF 2007-03-24 06:07:07: boat loader Message-ID: Can not get boat to go back in after unloading. Furnace is open From mtang at snf.stanford.edu Tue Mar 27 09:20:11 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 27 Mar 2007 09:20:11 -0700 Subject: Problem thermco2 SNF 2007-03-24 06:07:07: boat loader Message-ID: Appears to be fine now -- boat was inside when maintenance went to follow up.