Problem thermco2 SNF 2007-03-11 03:45:16: 2DRYOX gives error

[gth at snf.stanford.edu]

hi maurice
recepie 2DRYOX gives a field error ! I can not process my wafers....i am dead :()
i used the same recepie few minutes back to grow 60A oxide
now it does not work for 1000A ? :()
thanks
-gaurav