Problem thermco2 SNF 2007-03-11 03:45:16: 2DRYOX gives error

gth at snf.stanford.edu gth at snf.stanford.edu
Sun Mar 11 03:45:20 PDT 2007


hi maurice
recepie 2DRYOX gives a field error ! I can not process my wafers....i am dead :()
i used the same recepie few minutes back to grow 60A oxide
now it does not work for 1000A ? :()
thanks
-gaurav




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