From rwoo at snf.stanford.edu  Tue Sep 25 08:13:53 2007
From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu)
Date: Tue, 25 Sep 2007 08:13:53 -0700
Subject: Problem thermco2 SNF 2007-09-25 08:13:51: quartz wand
Message-ID: <mailman.95.1356283530.4803.thermco2-pcs@snf.stanford.edu>

Quartz wand appeared to be leaking - could hear air flowing but wand would not pick up wafers.  Switched tips with ASM epi.  Quartz on new tip is very loose and rotates freely - both the ASM epi and thermco tips should probably be replaced.



From mdickey at snf.stanford.edu  Thu Sep 27 07:42:19 2007
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Thu, 27 Sep 2007 07:42:19 -0700
Subject: Problem thermco2 SNF 2007-09-25 08:13:51: quartz wand
Message-ID: <mailman.96.1356283530.4803.thermco2-pcs@snf.stanford.edu>

Working wand at the furnaces