Problem thermco2 SNF 2007-09-25 08:13:51: quartz wand

rwoo at snf.stanford.edu rwoo at snf.stanford.edu
Tue Sep 25 08:13:53 PDT 2007


Quartz wand appeared to be leaking - could hear air flowing but wand would not pick up wafers.  Switched tips with ASM epi.  Quartz on new tip is very loose and rotates freely - both the ASM epi and thermco tips should probably be replaced.




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